Target: UPW quality compliance (≤5 μS/cm, ≥18 MΩ·cm)
Scope: EPC
Result: Stable UPW production supporting plant operation
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Complete UPW treatment equipment supplied and installed to meet stringent semiconductor standards.
Key modules include ion exchange system and ultrapure water treatment system for stable operation.
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Clean and organized process layout designed for efficient operation and maintenance.
Supports long-term performance of UPW production system and reliable water polishing system.
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Integrated electrical and control panels enabling precise monitoring and automated operation.
Ensures stable performance of the ultrapure water system during commissioning and daily production.
Product categories
